Vertically Conductive Single-Crystal SiC-Based Bragg Reflector Grown on Si Wafer

Single-crystal silicon carbide (SiC) thin-films on silicon (Si) were used for the fabrication and characterization of electrically conductive distributed Bragg reflectors (DBRs) on 100 mm Si wafers. The DBRs, each composed of 3 alternating layers of SiC and Al(Ga)N grown on Si substrates, show high...

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Detalles Bibliográficos
Autores principales: Massoubre, David, Wang, Li, Hold, Leonie, Fernandes, Alanna, Chai, Jessica, Dimitrijev, Sima, Iacopi, Alan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4658498/
https://www.ncbi.nlm.nih.gov/pubmed/26601894
http://dx.doi.org/10.1038/srep17026

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4658498/
https://www.ncbi.nlm.nih.gov/pubmed/26601894
http://dx.doi.org/10.1038/srep17026

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