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AlN Nanowall Structures Grown on Si (111) Substrate by Molecular Beam Epitaxy

AlN nanowall structures were grown on Si (111) substrate using molecular beam epitaxy at substrate temperature of 700 °C with N/Al flux ratios ranging from 50 to 660. A few types of other AlN nanostructures were also grown under the nitrogen-rich conditions. The AlN nanowalls were ranged typically 6...

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Detalles Bibliográficos
Autores principales: Tamura, Yosuke, Hane, Kazuhiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4666846/
https://www.ncbi.nlm.nih.gov/pubmed/26625884
http://dx.doi.org/10.1186/s11671-015-1178-7