Electrolithography- A New and Versatile Process for Nano Patterning

We report a new lithography technique based on electromigration driven material transport for drawing patterns at nanometer scales in ambient conditions. We use a thin metal film as a masking layer and a polymer layer beneath it as a pattern transfer layer. The desired pattern is drawn in the metal...

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Detalles Bibliográficos
Autores principales: Talukder, Santanu, Kumar, Praveen, Pratap, Rudra
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4669457/
https://www.ncbi.nlm.nih.gov/pubmed/26634991
http://dx.doi.org/10.1038/srep17753

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4669457/
https://www.ncbi.nlm.nih.gov/pubmed/26634991
http://dx.doi.org/10.1038/srep17753

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