Resonating Behaviour of Nanomachined Holed Microcantilevers

The nanofabrication of a nanomachined holed structure localized on the free end of a microcantilever is here presented, as a new tool to design micro-resonators with enhanced mass sensitivity. The proposed method allows both for the reduction of the sensor oscillating mass and the increment of the r...

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Detalles Bibliográficos
Autores principales: Canavese, Giancarlo, Ricci, Alessandro, Gazzadi, Gian Carlo, Ferrante, Ivan, Mura, Andrea, Marasso, Simone Luigi, Ricciardi, Carlo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4672296/
https://www.ncbi.nlm.nih.gov/pubmed/26643936
http://dx.doi.org/10.1038/srep17837

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4672296/
https://www.ncbi.nlm.nih.gov/pubmed/26643936
http://dx.doi.org/10.1038/srep17837

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