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Speckle lithography for fabricating Gaussian, quasi-random 2D structures and black silicon structures

Laser speckle pattern is a granular structure formed due to random coherent wavelet interference and generally considered as noise in optical systems including photolithography. Contrary to this, in this paper, we use the speckle pattern to generate predictable and controlled Gaussian random structu...

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Detalles Bibliográficos
Autores principales: Bingi, Jayachandra, Murukeshan, Vadakke Matham
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4683453/
https://www.ncbi.nlm.nih.gov/pubmed/26679513
http://dx.doi.org/10.1038/srep18452