Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers

AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ...

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Detalles Bibliográficos
Autores principales: Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang-Yang, Misra, Amit
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4683522/
https://www.ncbi.nlm.nih.gov/pubmed/26681109
http://dx.doi.org/10.1038/srep18554

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4683522/
https://www.ncbi.nlm.nih.gov/pubmed/26681109
http://dx.doi.org/10.1038/srep18554

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