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Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4683522/ https://www.ncbi.nlm.nih.gov/pubmed/26681109 http://dx.doi.org/10.1038/srep18554 |