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Fabrication of Periodic Plasmonic Structures Using Interference Lithography and Chalcogenide Photoresist

This study reports on the employment of the interference lithography (IL) technique, using photoresist based on the chalcogenide glass (ChG) films, for fabrication of one-dimensional (gratings) and two-dimensional (arrays) periodic plasmonic structures on the surface of glass plates. The IL techniqu...

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Detalles Bibliográficos
Autores principales: Dan’ko, Viktor, Dmitruk, Mykola, Indutnyi, Ivan, Mamykin, Sergii, Myn’ko, Victor, Lukaniuk, Mariia, Shepeliavyi, Petro, Lytvyn, Petro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4695465/
https://www.ncbi.nlm.nih.gov/pubmed/26714859
http://dx.doi.org/10.1186/s11671-015-1203-x