Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography

Ordered nanoarchitectures have attracted an intense research interest recently because of their promising device applications. They are always fabricated by self-assembling building blocks such as nanowires, nanodots. This kind of bottom up approaches is limited in poor control over height, lateral...

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Autores principales: Shi, Run, Huang, Chengzi, Zhang, Linfei, Amini, Abbas, Liu, Kai, Shi, Yuan, Bao, Shuhan, Wang, Ning, Cheng, Chun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4700459/
https://www.ncbi.nlm.nih.gov/pubmed/26729069
http://dx.doi.org/10.1038/srep18886
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author Shi, Run
Huang, Chengzi
Zhang, Linfei
Amini, Abbas
Liu, Kai
Shi, Yuan
Bao, Shuhan
Wang, Ning
Cheng, Chun
author_facet Shi, Run
Huang, Chengzi
Zhang, Linfei
Amini, Abbas
Liu, Kai
Shi, Yuan
Bao, Shuhan
Wang, Ning
Cheng, Chun
author_sort Shi, Run
collection PubMed
description Ordered nanoarchitectures have attracted an intense research interest recently because of their promising device applications. They are always fabricated by self-assembling building blocks such as nanowires, nanodots. This kind of bottom up approaches is limited in poor control over height, lateral resolution, aspect ratio, and patterning. Here, we break these limits and realize 3D sculpturing of vertical ZnO nanowire arrays (NAs) based on the conventional photolithography approach. These are achieved by immersing nanowire NAs in thick photoresist (PR) layers, which enable the cutting and patterning of ZnO NAs as well as the tailoring of NAs. Our strategy of 3D sculpturing of NAs promisingly paves the way for designing novel NAs-based nanoarchitectures.
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spelling pubmed-47004592016-01-13 Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography Shi, Run Huang, Chengzi Zhang, Linfei Amini, Abbas Liu, Kai Shi, Yuan Bao, Shuhan Wang, Ning Cheng, Chun Sci Rep Article Ordered nanoarchitectures have attracted an intense research interest recently because of their promising device applications. They are always fabricated by self-assembling building blocks such as nanowires, nanodots. This kind of bottom up approaches is limited in poor control over height, lateral resolution, aspect ratio, and patterning. Here, we break these limits and realize 3D sculpturing of vertical ZnO nanowire arrays (NAs) based on the conventional photolithography approach. These are achieved by immersing nanowire NAs in thick photoresist (PR) layers, which enable the cutting and patterning of ZnO NAs as well as the tailoring of NAs. Our strategy of 3D sculpturing of NAs promisingly paves the way for designing novel NAs-based nanoarchitectures. Nature Publishing Group 2016-01-05 /pmc/articles/PMC4700459/ /pubmed/26729069 http://dx.doi.org/10.1038/srep18886 Text en Copyright © 2016, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
Shi, Run
Huang, Chengzi
Zhang, Linfei
Amini, Abbas
Liu, Kai
Shi, Yuan
Bao, Shuhan
Wang, Ning
Cheng, Chun
Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
title Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
title_full Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
title_fullStr Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
title_full_unstemmed Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
title_short Three Dimensional Sculpturing of Vertical Nanowire Arrays by Conventional Photolithography
title_sort three dimensional sculpturing of vertical nanowire arrays by conventional photolithography
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4700459/
https://www.ncbi.nlm.nih.gov/pubmed/26729069
http://dx.doi.org/10.1038/srep18886
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