Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity

This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork (DETF) resonators, and the frequency output of t...

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Detalles Bibliográficos
Autores principales: Zhang, Jing, Su, Yan, Shi, Qin, Qiu, An-Ping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4704730/
https://www.ncbi.nlm.nih.gov/pubmed/26633425
http://dx.doi.org/10.3390/s151229803

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4704730/
https://www.ncbi.nlm.nih.gov/pubmed/26633425
http://dx.doi.org/10.3390/s151229803

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