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Erratum to: Optical properties and bandgap evolution of ALD HfSiO(x)films

Detalles Bibliográficos
Autores principales:	Yang, Wen, Fronk, Michael, Geng, Yang, Chen, Lin, Sun, Qing-Qing, Gordan, Ovidiu D., Zhou, Peng, Zahn, Dietrich R. T., Zhang, David Wei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2015
Materias:	Erratum
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4724996/ https://www.ncbi.nlm.nih.gov/pubmed/26428013 http://dx.doi.org/10.1186/s11671-015-1079-9

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