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Growing GaN LEDs on amorphous SiC buffer with variable C/Si compositions
The epitaxy of high-power gallium nitride (GaN) light-emitting diode (LED) on amorphous silicon carbide (a-Si(x)C(1−x)) buffer is demonstrated. The a-Si(x)C(1−x) buffers with different nonstoichiometric C/Si composition ratios are synthesized on SiO(2)/Si substrate by using a low-temperature plasma...
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4726127/ https://www.ncbi.nlm.nih.gov/pubmed/26794268 http://dx.doi.org/10.1038/srep19757 |