Cargando…
Atomic-layer soft plasma etching of MoS(2)
Transition from multi-layer to monolayer and sub-monolayer thickness leads to the many exotic properties and distinctive applications of two-dimensional (2D) MoS(2). This transition requires atomic-layer-precision thinning of bulk MoS(2) without damaging the remaining layers, which presently remains...
Autores principales: | , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4728689/ https://www.ncbi.nlm.nih.gov/pubmed/26813335 http://dx.doi.org/10.1038/srep19945 |