Cargando…

Atomic-layer soft plasma etching of MoS(2)

Transition from multi-layer to monolayer and sub-monolayer thickness leads to the many exotic properties and distinctive applications of two-dimensional (2D) MoS(2). This transition requires atomic-layer-precision thinning of bulk MoS(2) without damaging the remaining layers, which presently remains...

Descripción completa

Detalles Bibliográficos
Autores principales: Xiao, Shaoqing, Xiao, Peng, Zhang, Xuecheng, Yan, Dawei, Gu, Xiaofeng, Qin, Fang, Ni, Zhenhua, Han, Zhao Jun, Ostrikov, Kostya (Ken)
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4728689/
https://www.ncbi.nlm.nih.gov/pubmed/26813335
http://dx.doi.org/10.1038/srep19945