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Nano-Anatase TiO(2) for High Performance Optical Humidity Sensing on Chip
An on-chip optical humidity sensor using Nano-anatase TiO(2) coating is presented here. The coating material was prepared so that the result is in solution form, making the fabrication process quick and simple. Then, the solution was effortlessly spin-coated on an SU8 straight channel waveguide. Inv...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732072/ https://www.ncbi.nlm.nih.gov/pubmed/26729115 http://dx.doi.org/10.3390/s16010039 |