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Nano-Anatase TiO(2) for High Performance Optical Humidity Sensing on Chip

An on-chip optical humidity sensor using Nano-anatase TiO(2) coating is presented here. The coating material was prepared so that the result is in solution form, making the fabrication process quick and simple. Then, the solution was effortlessly spin-coated on an SU8 straight channel waveguide. Inv...

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Detalles Bibliográficos
Autores principales:	Ghadiry, Mahdiar, Gholami, Mehrdad, Choon Kong, Lai, Wu Yi, Chong, Ahmad, Harith, Alias, Yatima
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732072/ https://www.ncbi.nlm.nih.gov/pubmed/26729115 http://dx.doi.org/10.3390/s16010039

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