Integrated Amorphous Silicon p-i-n Temperature Sensor for CMOS Photonics

Hydrogenated amorphous silicon (a-Si:H) shows interesting optoelectronic and technological properties that make it suitable for the fabrication of passive and active micro-photonic devices, compatible moreover with standard microelectronic devices on a microchip. A temperature sensor based on a hydr...

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Detalles Bibliográficos
Autores principales: Rao, Sandro, Pangallo, Giovanni, Della Corte, Francesco Giuseppe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732100/
https://www.ncbi.nlm.nih.gov/pubmed/26751446
http://dx.doi.org/10.3390/s16010067

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732100/
https://www.ncbi.nlm.nih.gov/pubmed/26751446
http://dx.doi.org/10.3390/s16010067

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