Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition

In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and f...

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Detalles Bibliográficos
Autores principales: Li, Xiaomeng, Wu, Xiaoqing, Shi, Peng, Ye, Zuo-Guang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732102/
https://www.ncbi.nlm.nih.gov/pubmed/26771617
http://dx.doi.org/10.3390/s16010069

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732102/
https://www.ncbi.nlm.nih.gov/pubmed/26771617
http://dx.doi.org/10.3390/s16010069

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