Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage

Both an accurate machine design and an adequate metrology loop definition are critical factors when precision positioning represents a key issue for the final system performance. This article discusses the error budget methodology as an advantageous technique to improve the measurement accuracy of a...

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Detalles Bibliográficos
Autores principales: Torralba, Marta, Yagüe-Fabra, José Antonio, Albajez, José Antonio, Aguilar, Juan José
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732117/
https://www.ncbi.nlm.nih.gov/pubmed/26761014
http://dx.doi.org/10.3390/s16010084

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732117/
https://www.ncbi.nlm.nih.gov/pubmed/26761014
http://dx.doi.org/10.3390/s16010084

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