Cargando…
Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage
Both an accurate machine design and an adequate metrology loop definition are critical factors when precision positioning represents a key issue for the final system performance. This article discusses the error budget methodology as an advantageous technique to improve the measurement accuracy of a...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732117/ https://www.ncbi.nlm.nih.gov/pubmed/26761014 http://dx.doi.org/10.3390/s16010084 |