Large area scanning probe microscope in ultra-high vacuum demonstrated for electrostatic force measurements on high-voltage devices

Background: The resolution in electrostatic force microscopy (EFM), a descendant of atomic force microscopy (AFM), has reached nanometre dimensions, necessary to investigate integrated circuits in modern electronic devices. However, the characterization of conducting or semiconducting power devices...

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Detalles Bibliográficos
Autores principales: Gysin, Urs, Glatzel, Thilo, Schmölzer, Thomas, Schöner, Adolf, Reshanov, Sergey, Bartolf, Holger, Meyer, Ernst
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2015
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4734346/
https://www.ncbi.nlm.nih.gov/pubmed/26885461
http://dx.doi.org/10.3762/bjnano.6.258

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4734346/
https://www.ncbi.nlm.nih.gov/pubmed/26885461
http://dx.doi.org/10.3762/bjnano.6.258

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