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Ultra-high-throughput Production of III-V/Si Wafer for Electronic and Photonic Applications
Si-based integrated circuits have been intensively developed over the past several decades through ultimate device scaling. However, the Si technology has reached the physical limitations of the scaling. These limitations have fuelled the search for alternative active materials (for transistors) and...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4750074/ https://www.ncbi.nlm.nih.gov/pubmed/26864968 http://dx.doi.org/10.1038/srep20610 |