Cargando…

Thermodynamics of deposition flux-dependent intrinsic film stress

Vapour deposition on polycrystalline films can lead to extremely high levels of compressive stress, exceeding even the yield strength of the films. A significant part of this stress has a reversible nature: it disappears when the deposition is stopped and re-emerges on resumption. Although the debat...

Descripción completa

Detalles Bibliográficos
Autores principales: Saedi, Amirmehdi, Rost, Marcel J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4759625/
https://www.ncbi.nlm.nih.gov/pubmed/26888311
http://dx.doi.org/10.1038/ncomms10733