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Thermodynamics of deposition flux-dependent intrinsic film stress
Vapour deposition on polycrystalline films can lead to extremely high levels of compressive stress, exceeding even the yield strength of the films. A significant part of this stress has a reversible nature: it disappears when the deposition is stopped and re-emerges on resumption. Although the debat...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4759625/ https://www.ncbi.nlm.nih.gov/pubmed/26888311 http://dx.doi.org/10.1038/ncomms10733 |