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A programmable nanoreplica molding for the fabrication of nanophotonic devices

The ability to fabricate periodic structures with sub-wavelength features has a great potential for impact on integrated optics, optical sensors, and photovoltaic devices. Here, we report a programmable nanoreplica molding process to fabricate a variety of sub-micrometer periodic patterns using a si...

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Detalles Bibliográficos
Autores principales: Liu, Longju, Zhang, Jingxiang, Badshah, Mohsin Ali, Dong, Liang, Li, Jingjing, Kim, Seok-min, Lu, Meng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4772005/
https://www.ncbi.nlm.nih.gov/pubmed/26925828
http://dx.doi.org/10.1038/srep22445