High-bandwidth multimode self-sensing in bimodal atomic force microscopy

Using standard microelectromechanical system (MEMS) processes to coat a microcantilever with a piezoelectric layer results in a versatile transducer with inherent self-sensing capabilities. For applications in multifrequency atomic force microscopy (MF-AFM), we illustrate that a single piezoelectric...

Descripción completa

Detalles Bibliográficos
Autores principales: Ruppert, Michael G, Moheimani, S O Reza
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2016
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4778537/
https://www.ncbi.nlm.nih.gov/pubmed/26977385
http://dx.doi.org/10.3762/bjnano.7.26

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4778537/
https://www.ncbi.nlm.nih.gov/pubmed/26977385
http://dx.doi.org/10.3762/bjnano.7.26

Ejemplares similares