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Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine
The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the rea...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4783314/ https://www.ncbi.nlm.nih.gov/pubmed/26956598 http://dx.doi.org/10.1186/s11671-016-1341-9 |