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Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine
The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the rea...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4783314/ https://www.ncbi.nlm.nih.gov/pubmed/26956598 http://dx.doi.org/10.1186/s11671-016-1341-9 |
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author | Greer, Andrew IM Della-Rosa, Benoit Khokhar, Ali Z. Gadegaard, Nikolaj |
author_facet | Greer, Andrew IM Della-Rosa, Benoit Khokhar, Ali Z. Gadegaard, Nikolaj |
author_sort | Greer, Andrew IM |
collection | PubMed |
description | The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the reader to relate their known lithography process(es) to the findings. Using the converted tool, 1 cm(2) of nanopattern may be exposed in 6 s, over 3300 times faster than the electron beam equivalent. Nanoimprint tools are commercially available, but these can cost around 1000 times more than this customised computer numerical control (CNC) machine. The converted equipment facilitates rapid production and large area micro- and nanoscale research on small grants, ultimately enabling faster and more diverse growth in this field of science. In comparison to commercial tools, this converted CNC also boasts capacity to handle larger substrates, temperature control and active force control, up to ten times more curing dose and compactness. Actual devices are fabricated using the machine including an expanded nanotopographic array and microfluidic PDMS Y-channel mixers. ELECTRONIC SUPPLEMENTARY MATERIAL: The online version of this article (doi:10.1186/s11671-016-1341-9) contains supplementary material, which is available to authorized users. |
format | Online Article Text |
id | pubmed-4783314 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | Springer US |
record_format | MEDLINE/PubMed |
spelling | pubmed-47833142016-04-09 Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine Greer, Andrew IM Della-Rosa, Benoit Khokhar, Ali Z. Gadegaard, Nikolaj Nanoscale Res Lett Nano Express The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the reader to relate their known lithography process(es) to the findings. Using the converted tool, 1 cm(2) of nanopattern may be exposed in 6 s, over 3300 times faster than the electron beam equivalent. Nanoimprint tools are commercially available, but these can cost around 1000 times more than this customised computer numerical control (CNC) machine. The converted equipment facilitates rapid production and large area micro- and nanoscale research on small grants, ultimately enabling faster and more diverse growth in this field of science. In comparison to commercial tools, this converted CNC also boasts capacity to handle larger substrates, temperature control and active force control, up to ten times more curing dose and compactness. Actual devices are fabricated using the machine including an expanded nanotopographic array and microfluidic PDMS Y-channel mixers. ELECTRONIC SUPPLEMENTARY MATERIAL: The online version of this article (doi:10.1186/s11671-016-1341-9) contains supplementary material, which is available to authorized users. Springer US 2016-03-08 /pmc/articles/PMC4783314/ /pubmed/26956598 http://dx.doi.org/10.1186/s11671-016-1341-9 Text en © Greer et al. 2016 Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. |
spellingShingle | Nano Express Greer, Andrew IM Della-Rosa, Benoit Khokhar, Ali Z. Gadegaard, Nikolaj Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine |
title | Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine |
title_full | Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine |
title_fullStr | Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine |
title_full_unstemmed | Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine |
title_short | Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine |
title_sort | step-and-repeat nanoimprint-, photo- and laser lithography from one customised cnc machine |
topic | Nano Express |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4783314/ https://www.ncbi.nlm.nih.gov/pubmed/26956598 http://dx.doi.org/10.1186/s11671-016-1341-9 |
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