Large Area Nano-transfer Printing of Sub-50-nm Metal Nanostructures Using Low-cost Semi-flexible Hybrid Templates

In this work, we present a method for printing metal micro- and nanopatterns down to sub-50-nm feature sizes using replicated, defect-tolerant stamps made out of OrmoStamp®; material. The relevant parameters for a successful transfer over large areas were investigated and yields above 99 % have been...

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Detalles Bibliográficos
Autores principales: Nagel, Robin D., Haeberle, Tobias, Schmidt, Morten, Lugli, Paolo, Scarpa, Giuseppe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4791413/
https://www.ncbi.nlm.nih.gov/pubmed/26976429
http://dx.doi.org/10.1186/s11671-016-1346-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4791413/
https://www.ncbi.nlm.nih.gov/pubmed/26976429
http://dx.doi.org/10.1186/s11671-016-1346-4

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