Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist

Given the importance of complex nanofeatures in the filed of micro-/nanoelectronics particularly in the area of high-density magnetic recording, photonic crystals, information storage, micro-lens arrays, tissue engineering and catalysis, the present work demonstrates the development of new methodolo...

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Detalles Bibliográficos
Autores principales: Ghosh, Subrata, Satyanarayana, V. S. V., Pramanick, Bulti, Sharma, Satinder K., Pradeep, Chullikkattil P., Morales-Reyes, Israel, Batina, Nikola, Gonsalves, Kenneth E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4791541/
https://www.ncbi.nlm.nih.gov/pubmed/26975782
http://dx.doi.org/10.1038/srep22664

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4791541/
https://www.ncbi.nlm.nih.gov/pubmed/26975782
http://dx.doi.org/10.1038/srep22664

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