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Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist
Given the importance of complex nanofeatures in the filed of micro-/nanoelectronics particularly in the area of high-density magnetic recording, photonic crystals, information storage, micro-lens arrays, tissue engineering and catalysis, the present work demonstrates the development of new methodolo...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4791541/ https://www.ncbi.nlm.nih.gov/pubmed/26975782 http://dx.doi.org/10.1038/srep22664 |