Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams

A novel structure of the resonant pressure sensor is presented in this paper, which tactfully employs intercoupling between dual pressure-sensing diaphragms and a laterally driven resonant strain gauge. After the resonant pressure sensor principle is introduced, the coupling mechanism of the diaphra...

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Detalles Bibliográficos
Autores principales: Du, Xiaohui, Liu, Yifang, Li, Anlin, Zhou, Zhou, Sun, Daoheng, Wang, Lingyun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801536/
https://www.ncbi.nlm.nih.gov/pubmed/26821031
http://dx.doi.org/10.3390/s16020158

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801536/
https://www.ncbi.nlm.nih.gov/pubmed/26821031
http://dx.doi.org/10.3390/s16020158

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