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Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams
A novel structure of the resonant pressure sensor is presented in this paper, which tactfully employs intercoupling between dual pressure-sensing diaphragms and a laterally driven resonant strain gauge. After the resonant pressure sensor principle is introduced, the coupling mechanism of the diaphra...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801536/ https://www.ncbi.nlm.nih.gov/pubmed/26821031 http://dx.doi.org/10.3390/s16020158 |