Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures

Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive...

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Detalles Bibliográficos
Autores principales: Ren, Juan, Ward, Michael, Kinnell, Peter, Craddock, Russell, Wei, Xueyong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801580/
https://www.ncbi.nlm.nih.gov/pubmed/26861332
http://dx.doi.org/10.3390/s16020204

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801580/
https://www.ncbi.nlm.nih.gov/pubmed/26861332
http://dx.doi.org/10.3390/s16020204

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