Improved Sensitivity MEMS Cantilever Sensor for Terahertz Photoacoustic Spectroscopy

In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by r...

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Detalles Bibliográficos
Autores principales: Coutu, Ronald A., Medvedev, Ivan R., Petkie, Douglas T.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801627/
https://www.ncbi.nlm.nih.gov/pubmed/26907280
http://dx.doi.org/10.3390/s16020251

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801627/
https://www.ncbi.nlm.nih.gov/pubmed/26907280
http://dx.doi.org/10.3390/s16020251

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