Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor †

In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows th...

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Detalles Bibliográficos
Autores principales: Feng, Jinfeng, Kang, Xiaoxu, Zuo, Qingyun, Yuan, Chao, Wang, Weijun, Zhao, Yuhang, Zhu, Limin, Lu, Hanwei, Chen, Juying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813889/
https://www.ncbi.nlm.nih.gov/pubmed/26938538
http://dx.doi.org/10.3390/s16030314

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813889/
https://www.ncbi.nlm.nih.gov/pubmed/26938538
http://dx.doi.org/10.3390/s16030314

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