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Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor †
In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows th...
Autores principales: | Feng, Jinfeng, Kang, Xiaoxu, Zuo, Qingyun, Yuan, Chao, Wang, Weijun, Zhao, Yuhang, Zhu, Limin, Lu, Hanwei, Chen, Juying |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813889/ https://www.ncbi.nlm.nih.gov/pubmed/26938538 http://dx.doi.org/10.3390/s16030314 |
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