The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor

A piezoresistive pressure sensor with a beam-membrane-dual-island structure is developed for micro-pressure monitoring in the field of aviation, which requires great sensitivity and overload resistance capacity. The design, fabrication, and test of the sensor are presented in this paper. By analyzin...

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Detalles Bibliográficos
Autores principales: Meng, Xiawei, Zhao, Yulong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813923/
https://www.ncbi.nlm.nih.gov/pubmed/27005627
http://dx.doi.org/10.3390/s16030348

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813923/
https://www.ncbi.nlm.nih.gov/pubmed/27005627
http://dx.doi.org/10.3390/s16030348

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