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The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor
A piezoresistive pressure sensor with a beam-membrane-dual-island structure is developed for micro-pressure monitoring in the field of aviation, which requires great sensitivity and overload resistance capacity. The design, fabrication, and test of the sensor are presented in this paper. By analyzin...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813923/ https://www.ncbi.nlm.nih.gov/pubmed/27005627 http://dx.doi.org/10.3390/s16030348 |