A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump

This paper presents a novel digital closed loop microelectromechanical system (MEMS) accelerometer with the architecture and experimental evaluation. The complicated timing diagram or complex power supply in published articles are circumvented by using a charge pump system of adjustable output volta...

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Detalles Bibliográficos
Autores principales: Chu, Yixing, Dong, Jingxin, Chi, Baoyong, Liu, Yunfeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813964/
https://www.ncbi.nlm.nih.gov/pubmed/26999157
http://dx.doi.org/10.3390/s16030389

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4813964/
https://www.ncbi.nlm.nih.gov/pubmed/26999157
http://dx.doi.org/10.3390/s16030389

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