Optimized 2D array of thin silicon pillars for efficient antireflective coatings in the visible spectrum

Light reflection occuring at the surface of silicon wafers is drastically diminished by etching square pillars of height 110 nm and width 140 nm separated by a 100 nm gap distance in a square lattice. The design of the nanostructure is optimized to widen the spectral tolerance of the antireflective...

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Detalles Bibliográficos
Autores principales: Proust, Julien, Fehrembach, Anne-Laure, Bedu, Frédéric, Ozerov, Igor, Bonod, Nicolas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4842965/
https://www.ncbi.nlm.nih.gov/pubmed/27109643
http://dx.doi.org/10.1038/srep24947