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Repeatability and Reproducibility Standard Deviations in the Measurement of Trace Moisture Generated Using Permeation Tubes
Permeation-tube moisture generators are used in industry as calibrated sources of water vapor and carrier gas mixtures. Measurements were made using three permeation-tube moisture generators of the type used in the semiconductor industry. This paper describes repeatability and reproducibility standa...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2003
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4844508/ https://www.ncbi.nlm.nih.gov/pubmed/27413608 http://dx.doi.org/10.6028/jres.108.022 |