Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition

The pitch accuracy of a grating formed by laser-focused atomic deposition is evaluated from the point of view of fabricating nanoscale pitch standard artifacts. The average pitch obtained by the process, nominally half the laser wavelength, is simply traceable with small uncertainty to an atomic fre...

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Detalles Bibliográficos
Autores principales: McClelland, Jabez J., Anderson, William R., Bradley, Curtis C., Walkiewicz, Mirek, Celotta, Robert J., Jurdik, Erich, Deslattes, Richard D.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2003
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4844512/
https://www.ncbi.nlm.nih.gov/pubmed/27413597
http://dx.doi.org/10.6028/jres.108.0010

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4844512/
https://www.ncbi.nlm.nih.gov/pubmed/27413597
http://dx.doi.org/10.6028/jres.108.0010

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