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Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition
The pitch accuracy of a grating formed by laser-focused atomic deposition is evaluated from the point of view of fabricating nanoscale pitch standard artifacts. The average pitch obtained by the process, nominally half the laser wavelength, is simply traceable with small uncertainty to an atomic fre...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2003
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4844512/ https://www.ncbi.nlm.nih.gov/pubmed/27413597 http://dx.doi.org/10.6028/jres.108.0010 |