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Mechanism of stress-driven composition evolution during hetero-epitaxy in a ternary AlGaN system
Two AlGaN samples with different strain were designed to investigate mechanism of stress-driven composition evolution. It is discovered that AlGaN grown on AlN or (AlN/GaN superlattices (SLs))/GaN both consist of two distinct regions with different compositions: transition region and uniform region,...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4844960/ https://www.ncbi.nlm.nih.gov/pubmed/27112969 http://dx.doi.org/10.1038/srep25124 |