Rapid Stencil Mask Fabrication Enabled One-Step Polymer-Free Graphene Patterning and Direct Transfer for Flexible Graphene Devices

We report a one-step polymer-free approach to patterning graphene using a stencil mask and oxygen plasma reactive-ion etching, with a subsequent polymer-free direct transfer for flexible graphene devices. Our stencil mask is fabricated via a subtractive, laser cutting manufacturing technique, follow...

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Detalles Bibliográficos
Autores principales: Yong, Keong, Ashraf, Ali, Kang, Pilgyu, Nam, SungWoo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4846816/
https://www.ncbi.nlm.nih.gov/pubmed/27118249
http://dx.doi.org/10.1038/srep24890

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4846816/
https://www.ncbi.nlm.nih.gov/pubmed/27118249
http://dx.doi.org/10.1038/srep24890

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