Temperature-Dependent Nanofabrication on Silicon by Friction-Induced Selective Etching

Friction-induced selective etching provides a convenient and practical way for fabricating protrusive nanostructures. A further understanding of this method is very important for establishing a controllable nanofabrication process. In this study, the effect of etching temperature on the formation of...

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Detalles Bibliográficos
Autores principales: Jin, Chenning, Yu, Bingjun, Xiao, Chen, Chen, Lei, Qian, Linmao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4848285/
https://www.ncbi.nlm.nih.gov/pubmed/27119157
http://dx.doi.org/10.1186/s11671-016-1438-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4848285/
https://www.ncbi.nlm.nih.gov/pubmed/27119157
http://dx.doi.org/10.1186/s11671-016-1438-1

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