Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism

In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, whi...

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Detalles Bibliográficos
Autores principales: Guan, Yanwei, Gao, Shiqiao, Liu, Haipeng, Jin, Lei, Niu, Shaohua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4850982/
https://www.ncbi.nlm.nih.gov/pubmed/27049385
http://dx.doi.org/10.3390/s16040468

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4850982/
https://www.ncbi.nlm.nih.gov/pubmed/27049385
http://dx.doi.org/10.3390/s16040468

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