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Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism

In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, whi...

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Detalles Bibliográficos
Autores principales: Guan, Yanwei, Gao, Shiqiao, Liu, Haipeng, Jin, Lei, Niu, Shaohua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4850982/
https://www.ncbi.nlm.nih.gov/pubmed/27049385
http://dx.doi.org/10.3390/s16040468
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author Guan, Yanwei
Gao, Shiqiao
Liu, Haipeng
Jin, Lei
Niu, Shaohua
author_facet Guan, Yanwei
Gao, Shiqiao
Liu, Haipeng
Jin, Lei
Niu, Shaohua
author_sort Guan, Yanwei
collection PubMed
description In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, which enables the in-phase mode frequency to be 108.3% higher than the anti-phase one. The frequencies of the in- and anti-phase modes in the sense direction are 9799.6 Hz and 4705.3 Hz, respectively. The analytical solutions illustrate that the stiffness difference ratio of the in- and anti-phase modes is inversely proportional to the output induced by the vibration from the sense direction. Additionally, FEM simulations demonstrate that the stiffness difference ratio of the anchored diamond coupling TFG is 16.08 times larger than the direct coupling one while the vibration output is reduced by 94.1%. Consequently, the proposed new anchored diamond coupling TFG can structurally increase the stiffness difference ratio to improve the mode ordering and considerably reduce the vibration sensitivity without sacrificing the scale factor.
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spelling pubmed-48509822016-05-04 Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism Guan, Yanwei Gao, Shiqiao Liu, Haipeng Jin, Lei Niu, Shaohua Sensors (Basel) Article In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, which enables the in-phase mode frequency to be 108.3% higher than the anti-phase one. The frequencies of the in- and anti-phase modes in the sense direction are 9799.6 Hz and 4705.3 Hz, respectively. The analytical solutions illustrate that the stiffness difference ratio of the in- and anti-phase modes is inversely proportional to the output induced by the vibration from the sense direction. Additionally, FEM simulations demonstrate that the stiffness difference ratio of the anchored diamond coupling TFG is 16.08 times larger than the direct coupling one while the vibration output is reduced by 94.1%. Consequently, the proposed new anchored diamond coupling TFG can structurally increase the stiffness difference ratio to improve the mode ordering and considerably reduce the vibration sensitivity without sacrificing the scale factor. MDPI 2016-04-02 /pmc/articles/PMC4850982/ /pubmed/27049385 http://dx.doi.org/10.3390/s16040468 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons by Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Guan, Yanwei
Gao, Shiqiao
Liu, Haipeng
Jin, Lei
Niu, Shaohua
Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
title Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
title_full Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
title_fullStr Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
title_full_unstemmed Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
title_short Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
title_sort design and vibration sensitivity analysis of a mems tuning fork gyroscope with an anchored diamond coupling mechanism
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4850982/
https://www.ncbi.nlm.nih.gov/pubmed/27049385
http://dx.doi.org/10.3390/s16040468
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