Calibration of High-Resolution X-Ray Tomography With Atomic Force Microscopy

For two-dimensional x-ray imaging of thin films, the technique of scanning transmission x-ray microscopy (STXM) has achieved images with feature sizes as small as 40 nm in recent years. However, calibration of three-dimensional tomographic images that are produced with STXM data at this scale has no...

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Detalles Bibliográficos
Autores principales: Kalukin, Andrew R., Winn, Barry, Wang, Yuxin, Jacobsen, Chris, Levine, Zachary H., Fu, Joseph
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2000
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4877146/
https://www.ncbi.nlm.nih.gov/pubmed/27551641
http://dx.doi.org/10.6028/jres.105.067

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4877146/
https://www.ncbi.nlm.nih.gov/pubmed/27551641
http://dx.doi.org/10.6028/jres.105.067

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